handling of liquid MFCs
07-01-2008, 08:46 AM,
#1
handling of liquid MFCs
Hello, my name is Erdem and I am a new member. We have a MT-CVD system with two liquid (TiCl4 and CH3CN) mass flow controllers (Van Bronchorst) are installed on. Does anyone have an idea about the temperature and humidity conditions which these flowmeters should work with? In this time of summer temperature is up to 35 centigrade degrees (95 fahrenheit) in our coating plant. I beleive, that may ruin electronics of the flowmeters.
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