handling of liquid MFCs
07-01-2008, 07:54 AM,
#1
handling of liquid MFCs
Hello, my name is Erdem and I am a new member. We have a MT-CVD system with two liquid (TiCl4 and CH3CN) mass flow controllers (Van Bronchorst) are installed on. Does anyone have an idea about the temperature and humidity conditions which these flowmeters should work with? In this time of summer temperature is up to 35 centigrade degrees (95 fahrenheit) in our coating plant. I beleive, that may ruin electronics of the flowmeters.
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07-04-2008, 11:47 AM,
#2
RE: handling of liquid MFCs
Hi Erdem

Sign0016 to the Surface Engineering Forum.

I can only suggest you contact the manufacturers of your CVD system or Mass flow controllers (Van Bronchorst) and seek their advice.
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