Issues in Al coating on photoresist
02-16-2012, 11:35 AM,
#1
Issues in Al coating on photoresist
Dear I am having issues in coating of Aluminium thin film on photoresist. It just peel off.
If you can help me.
Best Regards.
Reply
02-17-2012, 12:12 PM,
#2
RE: Issues in Al coating on photoresist
Hello,
I am waiting for someone's reply.
Anyone having knowledge please share it with me!!!
The adhesion of Aluminium is not good on photoresist. What measures can we do to improve it?
Waiting for reply,
Best Regards!!!
Reply
02-19-2012, 12:41 AM,
#3
RE: Issues in Al coating on photoresist
How are preparing the surface? are you able to use a bond coat of nickel
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02-21-2012, 12:06 PM,
#4
RE: Issues in Al coating on photoresist
Here are some detail. Hoping that this will be helpful.
Photoresist is being spin-coated on the Si (silicon) substrate and 800 nm of Al (aluminium) thin film was deposited on the photoresist. And the thin film just peel off then. Any suggestions to improve the adhesion of Al thin film on photoresist.
Waiting for replies,
Best Regards!!!
Reply
02-23-2012, 08:51 AM,
#5
RE: Issues in Al coating on photoresist
Maybe someon on here can help answer this better. I thought this was a thermal spray question. Is the substrate being cleaned and or etched? Is the alumium in a solution, spun and then vac baked?
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03-13-2012, 10:26 AM,
#6
RE: Issues in Al coating on photoresist
which deposition method do you use in order to deposite the aluminum thin film?, I can assume that this is not a thermal spray application, so try to clean the surface with a thiner or other meccanica media.
Best regards
Luigi
Reply




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