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Re: Mass flow control for Gas (N2/Ar)

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Posted by Jim Treglio (204.213.51.10) on 21:02:26 14/06/05

In Reply to: Mass flow control for Gas (N2/Ar) posted by vijay Naria

Check with MKS Instruments. They make a complete line of mass flow controllers used extensively to control gas flow in PVD systems for depositing hard coatings (TiN, CrN, and the like).

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