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Is ceramic plasma coating parts good for carbon sputter deposition

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Posted by cc lim on January 24, 2003 at 10:19:11:

Hi,
We have some problem on carbon particle flake from normal AlO thermal coating during sputtering take place in an high vacuum chamber. Therefore would like to know if ceramic coating will be good for carbon deposition especially to those high energy carbon sputter process as DLC. Besides, I would like to know what type of ceramic material that will strongly recomment in this case.

best regards.....CC

Follow Ups:

Re: Is ceramic plasma coating parts good for carbon sputter deposition Gordon England 14:31:59 01/25/03(1)
- Re: Is ceramic plasma coating parts good for carbon sputter deposition Mark Jarratt 16:11:12 05/21/03(0)

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